algona® IC

industry components

SH-3500MB


High magnification beyond the optical limit

  • Max. 30.000x Magnification
  • BSE Detector
  • 1kV to 30kV Variable Accelerating Voltage
  • Multi-Vacuum Mode - Standard / Charge Up Reduction
  • Image Observation Ready within 2 min.
  • 3-axis Strokes - X,Y,Rotate or Tilt
  • Options - EDX System, Cooling Stage
SH-3500MB (1).jpg

SH-5000P


High magnification beyond the optical limit

  • Max. 100,000x Magnification
  • SE Detector + BSE Detector
  • 1kV to 30kV Variable Accelerating Voltage
  • Multi-Vacuum Mode - Standard / Charge Up Reduction
  • Image Observation Ready within 2 min.
  • 5-axis Strokes - X,Y,R, Z, T
  • 4-Hole Variable Aperture (30/50/100/200µm)
  • Options - EDX System, Cooling Stage, Low Vacuum Control
  • Motorization with point-to-click Feature
SH-5000M (1).jpg

SH-4000M


High magnification beyond the optical limit

  • Max. 60,000x Magnification
  • SE Detector & BSE Detector
  • 1kV to 30kV Variable Accelerating Voltage
  • Multi-Vacuum Mode - Standard / Charge Up Reduction
  • Image Observation Ready within 2 min.
  • 3-axis Strokes - X,Y,R
  • Options - EDX System, Cooling Stage
SH-4000M.jpg

REM Rasterlektronenmikroskop

Höchste Präzision für Forschung + Entwicklung

Besonderheiten:

  • Kompakt und Leistungsstark
  • Vergrößerung von 20x bis 100.000x
  • Beschleunigungsspannung 1 - 30 kV (auch stufenlos regelbar)
  • SE & BSE Detektor im Dual-View-Mode
  • Integration des EDX-Systems  QUANTAX von BRUKER mit variabler Detektorgröße
  • Extrem einfach zu bedienen, benutzerfreundliche Software
  • Sehr schnelle Probenwechsel: Vakuum in weniger als 3 Minuten!
  • Bildauflösung von 1280 x 960 bis 5120 x 3840 px
  • Umfangreiche Messoptionen
  • Gleicher Arbeitsabstand bei Bild-Erstellung und Materialanalyse
  • HyperMap ermöglicht eine komplette "Vorrats-" Analyse aller Elemente
  • Flexible Report-Gestaltung
  • System-Steuerung durch externen Standard-PC, anpassbar auf firmeninterne IT-Vorgaben.
  • Austausch des Filaments inhouse mit algona® IC Vorjustage-Kit möglich
  • algona® IC Verbrauchsmaterialien-Service
  • Vor-Ort-Service durch unser Technik-Team
Hirox-Logo-01
SH-5000Ma.jpg

Applications

Particle Measurement and Characteristic Analysis


  • Industrial Powder - High Molecule, Nano Powder
  • Battery Electrode / Pharmaceutical and Biological
Pictures Particle Measurement.jpg

Latex

Silicon Powder

Nano Powder

Lactic Acid Bacteria

Material, Science and Failure Analysis


  • Metal / Plastic and Ceramic / Film
  • Bio-Science
Pictures Science.jpg

Ceramic

Sea Animal

Rice

Flower's Stamen

Fiber Observation


  • Carbon Fiber / Glass Fiber
  • CNT (Carbon Nano Tube)
Pictures Fiber Observation.jpg

Fiber

Nano Wire

CNT (Carbon Nano Tube)

Fiber

Electronic Component Observation and Failure Analysis


  • BGA / PCB / Wafer
  • Bonding Wire / Micro-Electronics
Pictures Electronic Component Observation.jpg

Pattern

BGA Chip

Solarcell

Wire Bonding

Picture REM General

SH-3500MB


Electron system

Resolution

  • 20nm (30kV, BSE Image)

Magnification

  • 30x -~30.000x

Accelerating Voltage

  • 1-30kV (5/10/15/20/30)

Detector

  • Backscattered Electron (BSE)

Observation mode

  • Standard mode
  • Charge-up reduction mode

Electron Gun

  • Pre-centered Tungsten Filament Cartrige

Lens System

  • Two-stage Electromagnetic Condensor Lens
  • One-stage Electromagnetic Objective Lens


Stage system

Stage Traverse

  • 3-axis System: X,Y-axis: 35mm, R-Axis: 360°
  • Image Shift: ± 150µm
  • Chamber CCD Camera
  • T-axis: 0-45° (Option)

Max. Sample Size

  • 70mm Diameter, 30mm Height


Image system

Frame Memory

  • High Speed Mode (320x240) preview mode
  • Low Speed Mode (640x480)
  • Photo Mode1 (1280x960)
  • Photo Mode2 (2560x1920)
  • Photo Mode 3 (5120 x 3840)

Automation Function

  • Auto Focus, Auto Contrast & Brigthness

Image Format

  • BMP, JPG, PNG, TIFF

Data display

  • Magnification, Detector Type, Accelerating Voltage, Vacuum mode, Logo(text), Date and time, Micron marker


Vacuum system

Vacuum mode

  • High & Low Vacuum system

Vacuum Pump

  • Rotary Pump + Turbo Molecular Pump (Full Automation System)


PC System Requirements

OS

  • Microsoft Windows® 7

CPU

  • Intel Core i5

Memory / HDD

  • 2GB / 500 GB

Interface connector

  • USB 2.0


Dimensions and weight

Main Unit

  • 390(W)x380(D)x560(H)mm, 90kg

Controller Unit

  • 390(W)x325(D)x560(H)mm, 37kg

Rotary Pump

  • 400(W)x160(D)x340(H)mm, 24kg

Installation room

  • Room temperature: 15°C-30°C
  • Humidity: 70% or less
  • Electric power: Single phase 200-240V AC, 1kW 50/60Hz

Specifications

SH-4000M


Electron system

Resolution

  • 15nm (30kV, SE Image)
  • 20nm (30kV, BSE Image)

Magnification

  • 30x ~ 60.000x

Accelerating Voltage

  • 1-30kV (5/10/15/20/30)

Detector

  • Secondary Electron Image (SEI)
  • Backscattered Electron (BSE)

Observation mode

  • Standard mode
  • Charge-up reduction mode

Electron Gun

  • Pre-centered Tungsten Filament Cartrige

Lens System

  • Two-stage Electromagnetic Condensor Lens
  • One-stage Electromagnetic Objective Lens


Stage system

Stage Traverse

  • 3-axis System: X,Y-axis: 35mm, R-Axis: 360°
  • Image Shift: ± 150µm
  • Chamber CCD Camera
  • T-axis: 0-45° (Option)

Max. Sample Size

  • 70mm Diameter, 30mm Height


Image system

Frame Memory

  • High Speed Mode (320x240) preview mode
  • Low Speed Mode (640x480)
  • Photo Mode1 (1280x960)
  • Photo Mode2 (2560x1920)
  • Photo Mode 3 (5120 x 3840)

Automation Function

  • Auto Focus, Auto Contrast & Brigthness

Image Format

  • BMP, JPG, PNG, TIFF

Data display

  • Magnification, Detector Type, Accelerating Voltage, Vacuum mode, Logo(text), Date and time, Micron marker


Vacuum system

Vacuum mode

  • High & Low Vacuum system

Vacuum Pump

  • Rotary Pump + Turbo Molecular Pump (Full Automation System)


PC System Requirements

OS

  • Microsoft Windows® 7

CPU

  • Intel Core i5

Memory / HDD

  • 2GB / 500 GB

Interface connector

  • USB 2.0


Dimensions and weight

Main Unit

  • 390(W)x380(D)x560(H)mm, 90kg

Controller Unit

  • 390(W)x325(D)x560(H)mm, 37kg

Rotary Pump

  • 400(W)x160(D)x340(H)mm, 24kg

Installation room

  • Room temperature: 15°C-30°C
  • Humidity: 70% or less
  • Electric power: Single phase 200-240V AC, 1kW 50/60Hz

SH-5000P


Electron system

Resolution

  • 5nm (30kV, SE Image)
  • 8nm (30kV, BSE)

Magnification

  • 30x ~ 100.000x

Accelerating Voltage

  • 1-30kV (5/10/15/20/30)

Detector

  • Secondary Electron Image (SEI)
  • Backscattered Electron (BSE)

Observation mode

  • Standard mode
  • Charge-up reduction mode

Electron Gun

  • Pre-centered Tungsten Filament Cartrige

Lens System

  • Two-stage Electromagnetic Condensor Lens
  • One-stage Electromagnetic Objective Lens


Stage system

Stage Traverse

  • 5-axis System: X,Y-axis: 40mm, R-Axis: 360°
  • T-axis: 0-45°
  • Z-axis: 0-35mm
  • Image Shift: ± 150µm

Max. Sample Size

  • 80mm Diameter, 35mm Height


Image system

Frame Memory

  • High Speed Mode (320x240) preview mode
  • Low Speed Mode (640x480)
  • Photo Mode1 (1280x960)
  • Photo Mode2 (2560x1920)
  • Photo Mode 3 (5120 x 3840)

Automation Function

  • Auto Focus, Auto Contrast & Brigthness

Image Format

  • BMP, JPG, PNG, TIFF

Data display

  • Magnification, Detector Type, Accelerating Voltage, Vacuum mode, Logo(text), Date and time, Micron marker


Vacuum system

Vacuum mode

  • High & Low Vacuum system

Vacuum Pump

  • Rotary Pump + Turbo Molecular Pump (Full Automation System)


PC System Requirements

OS

  • Microsoft Windows® 7

CPU

  • Intel Core i5

Memory / HDD

  • 2GB / 500 GB

Interface connector

  • USB 2.0


Dimensions and weight

Main Unit

  • 390(W)x380(D)x560(H)mm, 90kg

Controller Unit

  • 390(W)x325(D)x560(H)mm, 37kg

Rotary Pump

  • 400(W)x160(D)x340(H)mm, 24kg

Installation room

  • Room temperature: 15°C-30°C
  • Humidity: 70% or less
  • Electric power: Single phase 200-240V AC, 1kW 50/60Hz
EDX-Result.jpg

Image Aquisition

Elemental ID Analysis

Quantification Analysis

Multi point Analysis

Line Scan

Mapping

Dual-View-Mode BSE and SE-01
semfeatures8.jpg

Imagine a higher state of resolution


The Hirox SEM series is focused on two essentials: powerful performance and user-friendly operation.


Using the table-top compact configuration, Mini-SEM provides high-resolution, high-magnification SEM images with the ease of use. Auto-focus, Auto-auto brightness and contrast produce an excellent image every time.


No doubt about strong performance and flexible integration. 5-axis full stroke control and 4-hole variable aperture of SH-5000M help fine-resolution SEM image. Built-in multi detector (SE+BSE) of SH-4000M provides the ideal observation for each different type of specimen. All Mini-SEM series including SH-3500MB provide image observation condition within 3 minutes after sample loading.


Optional EDX system and many other tools can be adapted for your application.

Major applications


Material Science

  • Metal / Ceramic Surface, Fiber Texture
  • Particle Distribution and Size Measurement
  • Failure Analysis – Corrosion, Stress
  • Asbestos


Semiconductor

  • Wafer, Bonding Wire, LED, Micro-Pattern
  • CNT (Carbon Nano Tube)


Biological / Pharmaceutical

  • Food, Bacteria, Medicinal Powder


Life Science / Energy

  • Solar Cell, Battery Electrode, Catalyst


Education / Healthcare

Präsentation anhand Ihrer Proben


Senden Sie uns Ihre Proben. Gerne präsentieren wir Ihnen anhand dieser Proben im Rahmen einer Web-Präsentation die Möglichkeiten unseres REM.

semfeatures7.jpg
Operating Software.jpg

Operating Software - User Interface

Dual View Mode - BSE and SE

SE + BSE Detector


  • Excellent atomic number resolution 0.1Z at Z=30
  • Choice of Detectors for normal, low voltage, UVH
Detector-SE.jpg
Detector-BSE.jpg

SE (Secondary Electron) Image - strong for topographic details

BSE (Backscattered Electron) Image - strong for compound details

BSE.jpg

4-Channel Fixed Type (Solid-State) Composition or Topographic Analysis

Installation Layout (1).jpg

Example of Installation Layout


  • Rotary Pump is placed separately with vibration reducer
  • Controller Unit and Main Unit can be separated by 2m (optional cabeling)

Accessories

EDX.jpg

EDX System


  • SDD Type – Nitrogen Free
  • Elemental Detection from Beryllium (4) to Americium (90) Spectrum Resolution < 129 eV (MnKa)
  • Multi-pointAnalysis / LineScan / ElemetalMapping

Light Element and Low Energy Analysis


 Producing reliable analytical results is a challenge, especially at low X-ray energies. Building on the excellent low energy performance of the XFlash® 6 detectors, the ESPRIT software contains several features supporting nano-analysis in the light-element / low-energy range.

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Real-Time Spectrometry


Taking advantage of the XFlash® 6 detectors’ speed, the real-time spectrometry function offers instant information on local sample characteristics.

HyperMap


ESPRIT HyperMap is one of the most versatile tools for EDX analysis. Select an area of interest, set up the acquisition, collect a map - even without any

csm_Icon_HyperMap
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Available Detectors


XFlash® 6 - 10 mm2

XFlash® 6 - 30 mm2

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© algona GmbH 2016